E-SEM Prisma E

This scanning electron microscope is equipped with a Tungsten electron source and various detectors for characterizing the morphology and chemical composition of various samples under different environment and pressure conditions:
Environmental pressure conditions –
The microscope can be operated in low-vacuum mode with a pressure of up to 130Pa and in environmental mode (E-SEM) with up to 2,600 Pa (H2O vapors). High-vapor-pressure samples such as liquids, pastes, gels, etc. can be observed. Low vacuum and ESEM modes enable charge-free imaging and analysis of nonconductive and/or hydrated specimens.
In E-SEM mode samples can be imaged even if they are hot, dirty, outgassing or wet (Software controlled -20°C to +60°C Peltier cold stage).
Chemical Composition Characterization –
The microscope is equipped with two advanced detectors:

  • A novel Silicon drift EDS detector Ultim-MAX (Oxford) with 100mm2 active area and 127eV energy resolution enables chemical composition characterization.
  • A WDS detector (Oxford) which delivers the highest spectral resolution available for the SEM and can detect elements in trace amounts (<100 ppm for many elements).

Imaging detectors –
The microscope is equipped with the following detectors:

  • ETD – Everhart-Thornley SE detector
  • DBS – Directional Backscatter Detector (lens-mounted segmented under-the-lens)
  • LVD – Low-vacuum SE detector
  • Gaseous SED (GSED) used in ESEM mode
  • ESEM-GAD for simultaneous SE and BSE detection in ESEM at high chamber pressure.