The Thermo Fisher Helios 5 Plasma Focused Ion Beam (PFIB) Workstation is the fifth generation fully digital, Extreme High Resolution (XHR) Field Emission Scanning Electron Microscope (FE-SEM) equipped with an inductively coupled plasma (ICP) focused ion beam (FIB).
It allows:
- In-situ large area sample preparation and high-resolution imaging and analysis of very large areas (hundreds of microns) to ensure collection of representative results.
- High performance site specific
- High volume material removal (for top down deprocessing)
- Cross-sectioning and fast characterization of nanometer details and analysis in 2D and 3D
- High quality sample preparation for TEM analysis and in-situ materials testing.
The PFIB is equipped with an Energy Dispersive X-ray Spectroscopy (EDS) system for chemical composition analysis and fast quantitative EDS mapping.