member-academic-staff

Prof. Emeritus Moshe Eizenberg

Moshe Eizenberg
+972-4-829-4585
Maydan 611

Prof. Eizenberg spent two years as a post-doctoral research associate in the Department of Materials Science and Engineering of Cornell University, and one year as a visiting scientist at IBM - T.J. Watson Research Center, Yorktown Heights. In 1980 he joined the Department of Materials Engineering and the Solid State Institute of the Technion. Currently he is also a member of the Russell Berrie Nanotechnology Institute. He was a visiting scientist at IBM T.J. Watson Research Center - Yorktown Heights, N.Y., Bell Laboratories - Murray Hill, N.J., The University of Paris (XI) - Orsay, Columbia University – New York, and at Applied Materials - Santa Clara, Ca. He is a member of the Materials Research Society (MRS), the American Vacuum Society (AVS), the Electrochemical Society, and the Israeli Vacuum Society.

Prof. Eizenberg has served on many national and Technion committees. In the years 1998-2001 he served as Dean (Chairman) of the Department of Materials Engineering. In the years 2002-2008 Prof. Eizenberg served as the executive Vice-President for Research of the Technion. In this capacity, in addition to many of his academic and administrative responsibilities, he served as a member of the Technion International Board of Governors and as a member on the boards of the following organizations: TRDF (Technion Research and Development Foundation Ltd.); EORD (Electrooptic Research and Development Company Ltd.); Technion Seed Ltd.; and numerous Technion research institutes. Furthermore, he was Chairman of the Board of Dimotech Ltd. (holding company for the Technion’s start-up industries) and TEIC Ltd. (Technion Entrepreneurial Incubator Company). In 2007-2008, he also served as Managing Director of TRDF. In 2011-2013 he was member of the Technion Managing Council. Currently Prof. Eizenberg is the Head of the Materials Engineering Program at Guangdong Technion Israel Institute of Technology, and member of the Board of Jacobs Technion-Cornell Institute in New York City.


Prof. Eizenberg has carried out research in diverse areas of materials, including semiconductors, metal surfaces and thin films, and dielectric thin films, with the aim of correlating physical properties such as structure and composition with electrical properties. His recent research focuses on interconnects and metallization technologies (front-end and back-end) for microelectronic devices.

The realization of microelectronic devices with nanometric dimensions relies on the successful integration of new materials into the existing production scheme. When the thickness of SiO2, which was used as the gate dielectric in traditional MOS devices, was reduced to few nanometers due to the scaling rules imposed by Moore’s law, tunneling current became significant. The increased leakage degraded the performance of devices, by changing the turn-on voltage of FETs and decreasing the retention time of capacitors. Replacing the SiO2 with a high-k dielectric enabled using a thicker gate dielectric layer, while maintaining high capacitance values and FET channel conductance.

The required replacement of SiO2 as the gate oxide was followed by an additional process: the replacement of the traditional doped poly-Si electrode by a metallic gate. The selection of a suitable metal/ high-k stack depends both on device requirements and material properties. And finally, future scaling of devices will be achieved by using high mobility (high injection velocity) and low bandgap semiconductors as channel materials on a Si platform. The leading candidate for an n-type channel material is InGaAs and Ge for p-type. In parallel there is an effort to use wide bandgap semiconductors, such as GaN, for power electronics applications.

Eizenberg's group has responded to these challenges by putting a strong emphasis on studying metal/high-k interfaces for future memory and high-performance devices. Various materials, such as Al2O3, HfO2 and lanthanide oxides (e.g. Gd2O3) as well as some nitrides are currently studied in his laboratory as gate dielectrics, and the interface between these dielectrics and various metals is explored. More recently these gate stacks are studied on top of other semiconductors than Si such as Ge, InGaAs, and GaN. This important research enables understanding the correlation between materials properties (e.g. interface composition, structure and binding) and electrical properties of metal/high-k/semiconductor stacks. In particular, the group has important achievements in understanding the effect of various properties on the effective work-function at the interface. Such an understanding enables to develop processes for tuning the Fermi-level position at metal/high-k interfaces.